Fabrication of Nb variable-thickness- and point-contact-type bridges by means of microfabrication technology
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- October 1980
- DOI:
- 10.1109/T-ED.1980.20143
- Bibcode:
- 1980ITED...27.2033G
- Keywords:
-
- Fabrication;
- Josephson Junctions;
- Metal Films;
- Microminiaturization;
- Niobium;
- Volt-Ampere Characteristics;
- Electrical Resistance;
- Etching;
- Film Thickness;
- Lithography;
- Radio Frequency Heating;
- Sputtering;
- Electronics and Electrical Engineering