Film properties of MoSi2 and their application to self-aligned MoSi2 gate MOSFET
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- August 1980
- DOI:
- 10.1109/T-ED.1980.20052
- Bibcode:
- 1980ITED...27.1431M
- Keywords:
-
- Field Effect Transistors;
- Metal Oxide Semiconductors;
- Molybdenum Compounds;
- Semiconducting Films;
- Silicides;
- Volt-Ampere Characteristics;
- Circuit Reliability;
- Contact Resistance;
- Self Alignment;
- Single Crystals;
- Substrates;
- Technology Assessment;
- Electronics and Electrical Engineering