Ion beam co-ordinate monitor
Abstract
It is noted that one standard noncontacting method for measuring the center coordinate of an ion-beam is based on processing the signals induced by the beam on suitably shaped electrons. The technique can be applied to continuous beams generated in low-energy implanting machines. It is shown that the coordinate of a continuous low-energy beam can be determined by measuring the angle of inclination of an elliptical pattern observed on an oscilloscope whose deflecting plates are driven directly by two noise-like signals induced by the beam on two electrostatic induction electrodes.
- Publication:
-
Electronics Letters
- Pub Date:
- August 1980
- DOI:
- 10.1049/el:19800478
- Bibcode:
- 1980ElL....16..674S
- Keywords:
-
- Cartesian Coordinates;
- Ion Beams;
- Monitors;
- Signal Processing;
- Coordinate Transformations;
- Operators (Mathematics);
- Position (Location);
- Electronics and Electrical Engineering