Influence of electron beam radiation on some parameters of MOS transistors examined by a scanning electron microscope
Abstract
- Publication:
-
Bulgarian Journal of Physics
- Pub Date:
- 1980
- Bibcode:
- 1980BlJPh...7..190G
- Keywords:
-
- Electron Bombardment;
- Electron Microscopes;
- Metal Oxide Semiconductors;
- Radiation Damage;
- Transistor Circuits;
- Electric Potential;
- Gates (Circuits);
- Integrated Circuits;
- Time Response;
- Electronics and Electrical Engineering