Epitaxial growth of ferroelectric PLZT thin film and their optical properties
Abstract
A series of experiments for growing epitaxial PLZT thin films has been made with rf sputtering. X-ray and electron diffraction analyses confirm that the fabricated films grow epitaxially on SrTiO3 and MgO crystals. A good transparency in the region above 0.4 μm to infrared with good ferroelectric properties is obtained. Propagation loss of He-Ne laser light is less than 6 dB/cm, and the PLZT thin film is a promising candidate for the optical modulator and other functional elements for integrated optics.
- Publication:
-
Applied Physics
- Pub Date:
- April 1980
- DOI:
- 10.1007/BF00895925
- Bibcode:
- 1980ApPhy..21..339O
- Keywords:
-
- Electro-Optics;
- Epitaxy;
- Ferroelectricity;
- Optical Properties;
- Semiconducting Films;
- Thin Films;
- Electron Diffraction;
- Lanthanum Compounds;
- Lead Compounds;
- Light Transmission;
- Refractivity;
- Single Crystals;
- Sputtering;
- Transparence;
- X Ray Diffraction;
- Zirconates;
- Solid-State Physics;
- PACS 42.80 - 78.20 - 85.60;
- 42.80;
- 78.20;
- 85.60