Ellipsometry of rough surfaces
Abstract
The paper discusses the results of a systematiccstudy of the effects of surface roughness parameters on ellipsometry measurements of both specially prepared periodic surfaces and surfaces prepared by industrial methods. The surface roughness parameters were calculated from surface profiles obtained with a stylus instrument, which have been digitized and permanently stored on a computer.
- Publication:
-
Applied Optics
- Pub Date:
- February 1980
- DOI:
- Bibcode:
- 1980ApOpt..19..561V
- Keywords:
-
- Ellipsometers;
- Optical Measurement;
- Surface Roughness;
- Incidence;
- Kirchhoff Law Of Radiation;
- Light Scattering;
- Machining;
- Nickel;
- Instrumentation and Photography;
- ELLIPSOMETRY;
- SURFACES