Electron microprobe analysis of tantalum-nitride thin films
Abstract
Quantitative chemical analysis of 500 and 2000 angstrom tantalum-nitride films on glass substrates is reported using an electron microprobe X-ray analyzer. Modifications to the microprobe are described. A description of the calibration procedure, the method of analysis, and the quantitative results are discussed.
- Publication:
-
Unknown
- Pub Date:
- June 1979
- Bibcode:
- 1979emat.rept.....S
- Keywords:
-
- Chemical Analysis;
- Tantalum Nitrides;
- Thin Films;
- X Ray Analysis;
- Calibrating;
- Electron Beams;
- Microelectronics;
- Solid-State Physics