We have performed measurements of relative integrated X-ray intensities in order to study the influence of radiation damage on the A15 structure of superconducting Nb 3Ge. With increasing He- and Ar-ion fluence an increase of the "temperature factor" and the lattice parameter has been observed in the fluence region where the depression of the superconducing transition temperature Tc was found to occur. Both parameters do not uniquely depend on the decrease of Tc. Further a decrease of the total relative X-ray intensity is found for particle fluences in the saturation region of Tc. The results are interpreted in terms of static atom displacements statistically distributed in the irradiated volume.