Simple sensitive capacitance manometer for corrosive gas laser systems
Abstract
The design and performance of a capacitance manometer for use in corrosive gas laser environments is presented. This simple and inexpensive isolating device can be quickly fabricated in any machine shop, and permits the utilization of ordinary non-passivated pressure measurement apparatus or gauges in any gas system, irrespective of the corrosiveness.
- Publication:
-
Review of Scientific Instruments
- Pub Date:
- February 1979
- DOI:
- Bibcode:
- 1979RScI...50..207S
- Keywords:
-
- Capacitance;
- Corrosion Resistance;
- Excimer Lasers;
- Gas Lasers;
- Manometers;
- Metal Surfaces;
- Surface Reactions;
- Design Analysis;
- Environment Effects;
- Network Synthesis;
- Performance Prediction;
- Pressure Measurement;
- Sensitivity;
- Instrumentation and Photography;
- 07.50.+f;
- 06.60.-c;
- 42.55.Hq;
- Laboratory procedures