Application of holographic interferometry for detecting defects due to changes in microrelief in microelectronic components
Abstract
- Publication:
-
Mikroelektronika
- Pub Date:
- April 1979
- Bibcode:
- 1979Mikro...8..166K
- Keywords:
-
- Electrical Faults;
- Electronic Equipment Tests;
- Holographic Interferometry;
- Microelectronics;
- Surface Defects;
- Coherent Light;
- Hologrammetry;
- Microstructure;
- Surface Roughness;
- Electronics and Electrical Engineering