Monolithic 20W 2GHz transistor and 5W 4GHz transistor
Abstract
Two metallization processes were developed for metallization of the deep V-grooves used as vias. These processes are being implemented on several lots of L-10 devices. A shipment of engineering samples of Type A and Type B devices was made to ERADCOM during this quarter.
- Publication:
-
Quarterly Report
- Pub Date:
- October 1978
- Bibcode:
- 1978trw..reptV....S
- Keywords:
-
- Integrated Circuits;
- Transistor Amplifiers;
- Transistors;
- Etching;
- Grooving;
- Passivity;
- Platinum;
- Superhigh Frequencies;
- Wafers;
- Electronics and Electrical Engineering