Surface roughness measurement
Abstract
The paper deals with noncontacting nondestructive method of measuring surface roughness properties using speckle patterns. Compared to a stylus-type mechanical profilometer, the speckle pattern method is relatively easy to handle. The coherent light speckle contrast method is shown to be useful for measuring fine-scale surface roughness, less than 0.25 micron, while polychromatic speckle pattern methods are better suited for moderate surface roughnesses, 0.2 to 5 microns. Speckle pattern correlation is applicable for comparatively rough surfaces, 1 to 30 microns.
- Publication:
-
Speckle Metrology
- Pub Date:
- 1978
- Bibcode:
- 1978spme.book...11A
- Keywords:
-
- Diffraction Patterns;
- Optical Measuring Instruments;
- Speckle Patterns;
- Surface Roughness;
- Coherent Light;
- Computerized Simulation;
- Light Scattering;
- Probability Density Functions;
- Profilometers;
- Statistical Analysis;
- Instrumentation and Photography