Field effect transistor and method of construction thereof
Abstract
A field effect transistor is constructed by placing a semi-conductor layer on an insulating substrate so that the gate region is separated from source and drain regions. The gate electrode and gate region of the layer are of generally reduced length, the gate region being of greatest length on its surface closest to the gate electrode. This is accomplished by initially creating a relatively large gate region of one polarity, and then reversing the polarity of a central portion of this gate region by ion bombardment, thus achieving a narrower final gate region of the stated configuration.
- Publication:
-
NASA Marshall Space Flight Center Report
- Pub Date:
- May 1978
- Bibcode:
- 1978msfc.rept.....F
- Keywords:
-
- Equipment Specifications;
- Field Effect Transistors;
- Insulation;
- Silicon Dioxide;
- Capacitance;
- Gates (Circuits);
- Patents;
- Production Engineering;
- Semiconductor Devices;
- Electronics and Electrical Engineering