The monolithic integration of surface acoustic wave and semiconductor circuit elements on silicon for matched filter device development

Work on the development of silicon-based monolithic programmable matched filter SAW devices capable of generating and processing binary code data is presented. Two programmable filters were designed, fabricated and tested using zinc oxide film transducers for surface acoustic wave generation, piezoresistive MOSFET taps for detection, and semiconductor logic elements for phase and amplitude control of the taps. The filters were developed at a carrier frequency of 100 MHz, with a 10 MHz bandwidth and a capability for generating and correlating 31-bit PN sequences. The developments serve to demonstrate the visibility of the monolithic integration of SAW and semiconductor elements, and permitted assessment of various aspects of the technology.