Performance limitations of two phase CCD's
Abstract
There are several different techniques available for achieving two-phase operation. These are discussed and compared. The performance of two-phase CCD's (charged coupled devices) fabricated with a coplanar, N-channel, double-level polysilicon gate process is described and compared between devices fabricated with stepped-oxide, implanted barriers and offset-gate structures. A comparison between surface and buried channel devices is also made. A basic three-phase charge transfer system was studied, and whilst such structures are simple in concept, they are difficult to operate. Performance limitations of a number of two-phase CCD structures when operating in both two-phase and the uniphase mode are discussed. Their performance is compared to the equivalent three-phase device.
- Publication:
-
In AGARD Impact of Charge Coupled Devices and Surface Acoustic Wave Devices on Signal Process. and Imagery in Advanced Systems 8 p (SEE N78-31279 22-31
- Pub Date:
- June 1978
- Bibcode:
- 1978iccd.agarR....B
- Keywords:
-
- Charge Coupled Devices;
- Charge Transfer;
- Silicon;
- Binary Systems (Materials);
- Ion Implantation;
- Metal Oxides;
- Performance;
- Technology Assessment;
- Electronics and Electrical Engineering