Structure and properties of "ohmic" contacts on GaSb

Measurements of the ohmic contact resistances of Ag-, Au-, Ni-, Al-, In-, Sn- and Ag-In contacts are described. These contacts were made by evaporating films on n- and p-GaSb. The stages of this process were investigated according to the crystalline state of the materials. The measurements indicated a considerable influence on contact resistance as a result of surface treatment and structure of the contact metals. Temperature effects were also noticeable. Sn/Ag/Au-contacts on n-GaSb and Ag- and Au-contacts on p-GaSb became ohmic contacts after an alloying process.