High purity liquid-phase epitaxial indium phosphide for microwave devices
Abstract
High purity indium phosphide layers were grown using the liquid phase epitaxial technique. These high purity InP layers were achieved by a combination of two factors: using high purity source InP and using indium with a low silicon content. Device applications considered include: Schottky-barriers on InP for field effect transistors; limited space charge accumulation devices for high power, high efficiency oscillators; and p(+)n IMPATT devices for material properties study, e.g., breakdown field and high field carrier velocity.
- Publication:
-
Ph.D. Thesis
- Pub Date:
- 1978
- Bibcode:
- 1978PhDT.........5I
- Keywords:
-
- Epitaxy;
- Indium Phosphides;
- Liquid Phases;
- Microwave Equipment;
- Crystal Growth;
- Field Effect Transistors;
- Schottky Diodes;
- Surface Layers;
- Electronics and Electrical Engineering