Energy and angular distribution of gold and copper atoms sputtered with either 15-or 30-KeV H +, He +, and Ar + ions
Abstract
The energy and angular distributions of sputtered gold and copper atoms have been determined for polycrystalline aggregates using a radioactive tracer technique. The neutron activated gold targets were bombarded with either 15-or 30-keV H +, He +, and Ar + ions, the copper targets with 30-keV Ar + ions only. The incident angle of the ion beam was 70°. p]It was possible for the first time to determine the energy distributions of neutrals sputtered by light ions. In the case of gold the energy distributions have a maximum at 1.9 eV, i.e. at half of the surface binding energy. On the high energy side of this maximum the distribution decreases roughly with E-1.8. The angular distributions show deviations from the cosine law, especially in the incident direction of the projectile ions and perpendicular to it.
- Publication:
-
Journal of Nuclear Materials
- Pub Date:
- October 1978
- DOI:
- 10.1016/0022-3115(78)90126-5
- Bibcode:
- 1978JNuM...76..136H
- Keywords:
-
- Atomic Collisions;
- Collision Parameters;
- Ion Impact;
- Plasma Interactions;
- Reactor Materials;
- Sputtering;
- Angular Distribution;
- Argon;
- Atomizing;
- Copper;
- Energy Distribution;
- Gold;
- Helium Ions;
- Hydrogen Ions;
- Ionic Reactions;
- Metal Crystals;
- Polycrystals;
- Plasma Physics