Application of ion-etching of grooves into quartz for surface acoustic wave devices
Abstract
The application of r.f.-sputter etching techniques to the fabrication of grooves in the surface of quartz is reported. This process has been used for the construction of devices which employ the interaction of surface acoustic waves with arrays of well-defined parallel grooves. Devices have been produced with grooves up to 2.5 microns deep, which have substantially rectangular profiles and controllable mark-to-space ratios. The groove geometries have been characterized using Talysurf, optical microscopy, SEM and TEM techniques.
- Publication:
-
Journal of Materials Science
- Pub Date:
- October 1978
- DOI:
- 10.1007/BF00541663
- Bibcode:
- 1978JMatS..13.2105M
- Keywords:
-
- Etching;
- Ion Beams;
- Quartz;
- Surface Acoustic Wave Devices;
- Argon;
- Grooves;
- Optical Microscopes;
- Radio Physics;
- Sputtering;
- Instrumentation and Photography