Plasma rate equations for an rf discharge in a magnetic field
Abstract
A set of plasma rate equations are obtained which describe the time evolution of the electron density and temperature for an rf discharge in a magnetic field. Numerical solutions to these equations have been obtained for argon at pressures of 0.1100 mTorr using the classical rf conductivity as the mechanism for transferring energy from the rf field to the electrons, and ambipolar diffusion and disassociative recombination as the dominant loss mechanisms. The typical temperature solution exhibits two welldefined temperature plateaus. The electrondensity solution exhibits a monotonic growth to a saturation value which constitutes an appreciable percentage of the initial neutralparticle density. At the higher pressures, such large amounts of power are required to maintain the saturation density that source power may be the principle limitation on the maximum density achievable in the typical rf plasma source.
 Publication:

Journal of Applied Physics
 Pub Date:
 May 1978
 DOI:
 10.1063/1.325188
 Bibcode:
 1978JAP....49.2689S
 Keywords:

 Energy Conservation;
 Magnetic Fields;
 Plasma Density;
 Radio Frequency Discharge;
 Time Dependence;
 Boltzmann Distribution;
 Collision Rates;
 Distribution Functions;
 Electron Density (Concentration);
 Electron Energy;
 Microwave Frequencies;
 Numerical Analysis;
 Recombination Reactions;
 Saturation;
 Plasma Physics;
 52.80.Pi;
 52.50.Gj;
 52.25.Dg;
 52.50.Dg;
 Highfrequency and RF discharges;
 Plasma heating by particle beams;
 Plasma kinetic equations;
 Plasma sources