Manufacturing methods and technology engineering high-efficiency, high-power gallium arsenide read-type IMPATT diodes, volume 2
Abstract
This volume includes all of the process specifications for the High-Power, High-Efficiency Gallium-Arsenide IMPATT Diode. The detailed process sheets are grouped in accordance with the particular process area where they are used. A flow chart for each group shows the interrelationship of operations. Applicable drawings are also included in Section II.
- Publication:
-
Final Report
- Pub Date:
- June 1977
- Bibcode:
- 1977rayc.reptS....C
- Keywords:
-
- Avalanche Diodes;
- Gallium Arsenides;
- Production Management;
- Schottky Diodes;
- Flow Charts;
- Microwave Equipment;
- Photolithography;
- Semiconductor Devices;
- Wafers;
- Electronics and Electrical Engineering