Dependence of dielectric strength of thin dielectric layers in MIS devices on voltage polarity
Abstract
Studies of the dependence of dielectric strength of thin dielectric layers used in MIS devices on voltage polarity and layer thickness are summarized. The main observation to be explained is that the dielectric strength of dielectric thin films display unipolar dependence. Also, the variation of dielectric strength seems to depend on the method of preparing the thin films. Some possible causes for the polarity dependence of dielectric strength are discussed.
- Publication:
-
Slaboproudy Obzor
- Pub Date:
- October 1977
- Bibcode:
- 1977SlaOb..38..483R
- Keywords:
-
- Dielectric Properties;
- Mis (Semiconductors);
- Polarity;
- Thin Films;
- Electric Potential;
- Integrated Circuits;
- Semiconductor Devices;
- Electronics and Electrical Engineering