Optical scanning tests of complex CMOS microcircuits
Abstract
The new test method was based on the use of a raster-scanned optical stimulus in combination with special electrical test procedures. The raster-scanned optical stimulus was provided by an optical spot scanner, an instrument that combines a scanning optical microscope with electronic instrumentation to process and display the electric photoresponse signal induced in a device that is being tested.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- October 1977
- Bibcode:
- 1977STIN...7813326L
- Keywords:
-
- Microelectronics;
- Nondestructive Tests;
- Optical Scanners;
- Display Devices;
- Semiconductor Devices;
- Electronics and Electrical Engineering