Reaction kinetics of excimer lasers using NF3
Abstract
Disappearance of NF3 and appearance of NF2 and N2F2 in an excimer laser is followed quantitatively with a mass spectrometer. A model for the kinetics is presented.
- Publication:
-
Applied Physics
- Pub Date:
- May 1977
- DOI:
- 10.1007/BF00890711
- Bibcode:
- 1977ApPhy..13....1C
- Keywords:
-
- Gas Lasers;
- Laser Outputs;
- Nitrogen Fluorides;
- Pulsed Lasers;
- Reaction Kinetics;
- Chemical Reactions;
- Laser Cavities;
- Mass Spectroscopy;
- Lasers and Masers;
- PACS Code 42.55;
- 42.55