Film-thickness determination in electron microscopy - The electron backscattering method
Abstract
The electron backscattering properties of thin films have been utilized in developing a new thickness-determination method which has special advantages in electron optics. The method allows the direct determination of the thickness of micro-areas of self-supporting films or of films on supporting substrates without using reference films. Attention is given to the application of this method to amorphous, polycrystal and single crystal films.
- Publication:
-
Optica Acta
- Pub Date:
- June 1977
- DOI:
- 10.1080/713819609
- Bibcode:
- 1977AcOpt..24..679N
- Keywords:
-
- Backscattering;
- Electron Microscopy;
- Electron Scattering;
- Film Thickness;
- Thin Films;
- Amorphous Materials;
- Bragg Angle;
- Electron Optics;
- Gold Coatings;
- Metal Films;
- Polycrystals;
- Single Crystals;
- Instrumentation and Photography