Control of microcircuit contamination. A microsensor moisture measurement
Abstract
An anodized aluminum microsensor was developed for in-package monitoring of moisture in microcircuit package atmospheres. Sensors were characterized with respect to accuracy, reproducibility and operational limitations. Investigations included package self-generated contamination, sensor temperature cycling, stability studies, and comparison with mass spectrometry. Compatibility with semiconductor package design is discussed.
- Publication:
-
Final Technical Report
- Pub Date:
- March 1976
- Bibcode:
- 1976ti...reptS....C
- Keywords:
-
- Contamination;
- Microelectronics;
- Moisture;
- Metal Coatings;
- Semiconductors (Materials);
- Spectroscopic Analysis;
- Communications and Radar