Gas phase deposition of insulating films

Organic dielectric films (with a thickness down to 100 nm) could be deposited on metallized carrier foils in a continuous process by glow discharge in monomer gases. Depending on the applied monomers, the films had a dissipation factor of 0.001 to 0.003 (1kHz), a relative permittivity of 2.3 to 2.5, and a resistivity of about 10 to 17th power ohm cm. Moreover, they proved to have a very high dielectric strength (up to 800 V/micron) and good mechanical homogeneity. Self-healing rolled capacitors with a very high capacitance per volume and of consistently high quality (68 microF/cu cm) were manufactured from the metallized carrier foils covered with the deposited dielectric film.