Design, processing, and testing of LSI arrays for space station
Abstract
The applicability of a particular process for the fabrication of large scale integrated circuits is described. Test arrays were designed, built, and tested, and then utilized. A set of optimum dimensions for LSI arrays was generated. The arrays were applied to yield improvement through process innovation, and additional applications were suggested in the areas of yield prediction, yield modeling, and process reliability.
- Publication:
-
Final Report
- Pub Date:
- August 1976
- Bibcode:
- 1976rca..reptR....I
- Keywords:
-
- Integrated Circuits;
- Large Scale Integration;
- Space Stations;
- Circuit Diagrams;
- Electronic Equipment Tests;
- Gates (Circuits);
- Silicon;
- Electronics and Electrical Engineering