Defect structure in GaAs
Abstract
A unified computer program is presented, which is useful for the generation of indexed Kossel, pseudo-Kossel, Kikuchi, and channeling maps. The application of Impact Sound Stressing, a novel technique to introduce damage into wafer surfaces, is discussed for GaAs. Equipment and operational parameters are given. Impact Sound Stress induced damage in GaAs surfaces is characterized by light optical and scanning electron microscopy.
- Publication:
-
Final Report
- Pub Date:
- September 1976
- Bibcode:
- 1976ibm..reptU....S
- Keywords:
-
- Crystal Defects;
- Gallium Arsenides;
- Computer Programs;
- Stress Analysis;
- X Ray Diffraction;
- Solid-State Physics