Photolithographic techniques for Surface Acoustic Wave (SAW) devices
Abstract
The object of the program is the establishment of a production capability for surface acoustic wave devices of varied design and material for the purpose of meeting estimated military needs for a period of two years after the completion of the contract and to establish a base and plans which may be used to meet expanded requirements. The primary requirement is the pilot line production of devices that are reliable, reproducible, and low cost. Fabrication for the 3rd, Confirmatory Phase of the program has been accomplished and environmental testing is nearing completion.
- Publication:
-
Quarterly Report
- Pub Date:
- October 1976
- Bibcode:
- 1976hac..reptR....J
- Keywords:
-
- Sound Waves;
- Surface Waves;
- Bandpass Filters;
- Lithography;
- Photomechanical Effect;
- Acoustics