Theory of the pulsed microwave discharge at high gas pressure. I - Electron concentration and field in plasma. II - Electron distribution function and temperature
Abstract
A system of equations defining the kinetic and electrodynamic parameters of a pulsed microwave discharge plasma is investigated. For sufficiently high gas pressures the following two problems are solved in succession: determination of the electron concentration and field in the plasma from the concentration balance equation and Maxwell equations, and the determination of the electron velocity distribution function and the electron temperature from the kinetic equation and the energy balance equation. Numerical computations are performed for a discharge device consisting of a rectangular waveguide with a thin quartz tube place perpendicularly to the broad walls in the waveguide center.
- Publication:
-
Zhurnal Tekhnicheskoi Fiziki
- Pub Date:
- November 1976
- Bibcode:
- 1976ZhTFi..46.2250P
- Keywords:
-
- Electron Density (Concentration);
- Microwaves;
- Plasma Jets;
- Pulsed Radiation;
- Radio Frequency Discharge;
- Electron Energy;
- Gas Pressure;
- High Pressure;
- Kinetic Equations;
- Maxwell Equation;
- Rectangular Waveguides;
- Velocity Distribution;
- Plasma Physics