Evaluating the concentration profiles of impurities from measurements of the voltage dependence of capacitance by means of a computer

The article describes a computer program enabling a general calculation of the concentration of impurities to be carried out from data obtained by measuring the voltage dependence of the capacitance in a Schottky diode. The program calculates the concentration profile partly using the smoothing method of least squares, partly by the so-called method of osculating parabolas. Both methods are described in the present article and discussed as well. Part of the computer output is a graphic plot of the concentration profile.