A Step Height Interferometer with One Nanometer Resolution
Abstract
An interferometer is described for the measurement of thin film steps. The instrument is a double-pass polarization interferometer and has a resolution of one nanometer. It is selfcontained and features simplicity in construction and operation. Measurements illustrating its performance are given.
- Publication:
-
Optical Engineering
- Pub Date:
- April 1976
- DOI:
- 10.1117/12.7971942
- Bibcode:
- 1976OptEn..15..180H