Vacuum-arc source of metallic ions

Vacuum discharge systems developed for use as metallic ion sources are described. The pulses are formed by charging a capacitor to such a voltage that breakdown occurs between electrodes spaced less than 1 mm apart. Upon breakdown, the capacitor is discharged through the gap which then returns to a nonconducting state and the process is repeated. Ion production is measured for a variety of conditions. Also, the ionization states are identified. The systems differed in the way that the electrode gap was controlled through feedback and thus in the modes of stable operation which have been demonstrated. Erosion rates have been measured and potential applications of the erosion phenomenon are given.