Radiation effects on oxides, semiconductors, and devices
Abstract
Contents: Oxide studies--Hole and electron transport in SiO2 films, Charge transport studies in SiO2: processing effects and implications for radiation hardening, Ionizing dose rate effects in MOS devices, Experiments on MOS capacitors fabricated on a p-type silicon substrate, Ion microanalyzer measurements on SiO2 films, Effects of bias polarity on current flow in SiO2 under electron beam injection, Studies of charge transport and charge buildup in pure SiO2 and Al--implanted pure SiO2, Determination of hole mobility in SiO2 films; Semiconductor studies.
- Publication:
-
Final Report
- Pub Date:
- May 1975
- Bibcode:
- 1975nrtc.rept.....S
- Keywords:
-
- Oxides;
- Radiation Effects;
- Semiconductor Devices;
- Semiconductors (Materials);
- Electron Mobility;
- Holes (Electron Deficiencies);
- Metal Oxide Semiconductors;
- Silicon Dioxide;
- Solid-State Physics