Special devices, test structures, and hybrid circuits for special environments
Abstract
The report describes eight special semiconductor devices or test structures plus an interconnection method developed for interconnecting multiple chip hybrid circuits. Non-gold, compatible material structures and fabrication techniques are used in making these special devices.
- Publication:
-
Final Report
- Pub Date:
- October 1974
- Bibcode:
- 1974ti...rept.....M
- Keywords:
-
- Integrated Circuits;
- Semiconductor Devices;
- Test Facilities;
- Ceramics;
- Production Engineering;
- Reliability Engineering;
- Electronics and Electrical Engineering