System for depositing thin films
Abstract
A system for depositing a thin film of one material on another is described. A mass filter is interposed between the source of material being deposited and the object upon which deposition is being made.
- Publication:
-
NASA Marshall Space Flight Center Report
- Pub Date:
- November 1974
- Bibcode:
- 1974msfc.rept.....T
- Keywords:
-
- Thin Films;
- Vapor Deposition;
- Fluid Filters;
- Ion Beams;
- Patents;
- Vacuum Chambers;
- Engineering (General)