Electron-probe instruments

The book discusses the physical foundations of electron-probe technology, its operating principles, and the structural characteristics and informational capabilities of various electron-probe instruments, including traditional electron microscopes and newer types of devices with scanning beams. The book first explains some basic principles of electron optics which are especially important to an understanding of the capabilities of electron-probe devices. The other topics covered include the physical bases of electron-probe technology, including electron diffraction, secondary emission, and other phenomena; electron microscopes with a stationary probe; and instruments with scanning electron probes. The use of electron-probe instruments in research on microfields and the structure, properties, and microgeometry of objects is discussed.