Monolithic polycrystalline-silicon pressure transducer
Abstract
A monolithic pressure transducer using polycrystalline silicon for both the diaphragm material and an integral piezoresistor has been fabricated. The device can be made with good repeatability and with easily varied diaphragm thickness. Electrical-output linearity is very good over a pressure range of 0-11 cm Hg for a 2.4 micron diaphragm having an area of 0.00136 sq cm.
- Publication:
-
Electronics Letters
- Pub Date:
- October 1974
- DOI:
- 10.1049/el:19740335
- Bibcode:
- 1974ElL....10..420J
- Keywords:
-
- Integrated Circuits;
- Piezoresistive Transducers;
- Polycrystals;
- Pressure Sensors;
- Silicon Junctions;
- Diaphragms (Mechanics);
- Linearity;
- Pressure Measurement;
- Silicon Dioxide;
- Instrumentation and Photography