Optical applications of ion beam machining
Abstract
It is now apparent that ion beams have a role to play in the machining and polishing of optical components. In this paper we review some of the applications which have been reported so far and also consider future applications. Since ion beam machining is not a passive process we consider the topographies which are generated by the technique and their relevance to device manufacture.
- Publication:
-
Optics Laser Technology
- Pub Date:
- October 1973
- DOI:
- 10.1016/0030-3992(73)90004-2
- Bibcode:
- 1973OptLT...5..205B