High-resolution thermionic cathode scanning transmission electron microscope
Abstract
A new scanning transmission electron microscope has been built which uses a lanthanum hexaboride thermal cathode electron gun. Initial results indicate a beam diameter of 5 Å and point-to-point resolution of 7 Å. The vacuum level in the instrument is similar to that of standard commercially available electron microscopes. A comparison of the performance of tungsten hairpin, lanthanum hexaboride, and field emission cathodes for scanning transmission electron microscopy is given.
- Publication:
-
Applied Physics Letters
- Pub Date:
- June 1973
- DOI:
- 10.1063/1.1654527
- Bibcode:
- 1973ApPhL..22..610B