High cooling power density SiGe/Si micro-coolers Fan, X. ; Zeng, G. ; Croke, E. ; LaBounty, C. ; Ahn, C. C. ; Vashaee, D. ; Shakouri, A. ; Bowers, J. E. Abstract Publication: Electronics Letters Pub Date: 2001 DOI: 10.1049/el:20010096 Bibcode: 2001ElL....37..126F