Organ pipe radiant modes of periodic micromachined silicon surfaces
Abstract
Measurements of 400 C of infrared, normal, s- and p-polarized spectral emittances of 45 micron deep, near square-wave gratings of heavily phosphorus-doped (110) silicon are reported. The grating surface repeat scales (Lambda) were 10, 14, 18, and 22 microns, yielding a range of Lambda/lambda from 0.14 to 7.33. The s-polarization vector was parallel to the grating slots. Both s and p spectral emittances had pronounced resonant periodicities with a characteristic length of about 42 microns. A reasonable explanation for this behavior is the presence of standing waves in the air slots perpendicular to the silicon surface similar to those in an organ pipe. While the resonant amplitude of the s-polarization does not depend significantly on Lambda, it does for the p-polarization.
- Publication:
-
Nature
- Pub Date:
- December 1986
- DOI:
- 10.1038/324549a0
- Bibcode:
- 1986Natur.324..549H
- Keywords:
-
- Anemometers;
- Heat Transfer;
- Silicon;
- Standing Waves;
- Surface Roughness;
- Emission Spectra;
- Infrared Radiation;
- P Waves;
- Polarized Electromagnetic Radiation;
- S Waves;
- Optics