Resolution Limits of Electron-Beam Lithography toward the Atomic Scale Manfrinato, Vitor R. ; Zhang, Lihua ; Su, Dong ; Duan, Huigao ; Hobbs, Richard G. ; Stach, Eric A. ; Berggren, Karl K. Abstract Publication: Nano Letters Pub Date: April 2013 DOI: 10.1021/nl304715p Bibcode: 2013NanoL..13.1555M