VOC sensing using batch-fabricated temperature compensated self-leveling microstructures
Abstract
Intrinsic temperature compensation mechanism based on mechanical self-leveling. No externally powered temperature compensation electronics required. Significant improvement to simple microcantilever type vapor sensors. Polyimide, Polyurethane and PDMS polymers used for the detection of VOCs. Target identification using Support Vector Machine algorithm.
- Publication:
-
Sensors and Actuators B: Chemical
- Pub Date:
- May 2020
- DOI:
- 10.1016/j.snb.2020.127817
- arXiv:
- arXiv:2002.01404
- Bibcode:
- 2020SeAcB.31127817L
- Keywords:
-
- Capacitive sensors;
- Polymer swelling;
- Self-leveling;
- Volatile organic compounds;
- Physics - Applied Physics
- E-Print:
- 15 pages, 13 figures. Manuscript accepted for publication in Sensors and Actuators B: Chemical