Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging
Abstract
We present a strip transition-edge sensor microcalorimeter linear array detector developed for energy dispersive X-ray diffraction imaging and Compton scattering applications. The prototype detector is an array of 20 transition-edge sensors with absorbers in strip geometry arranged in a linear array. We discuss the fabrication steps needed to develop this array including Mo/Cu bilayer, Au electroplating, and proof-of-principle fabrication of long strips of SiNx membranes. We demonstrate minimal unwanted effect of strip geometry on X-ray pulse response and show linear relationship of 1/pulse height and pulse decay times with absorber length. For the absorber lengths studied, our preliminary measurements show energy resolutions of 40-180 eV near 17 keV. Furthermore, we show that the heat flow to the cold bath is nearly independent of the absorber area and depends on the SiNx membrane geometry.
- Publication:
-
Journal of Low Temperature Physics
- Pub Date:
- February 2020
- DOI:
- 10.1007/s10909-019-02267-7
- arXiv:
- arXiv:1908.10239
- Bibcode:
- 2020JLTP..199..384P
- Keywords:
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- TES;
- Microcalorimeters;
- Cryogenic detectors;
- EDXRD;
- DRIE;
- Physics - Instrumentation and Detectors
- E-Print:
- Accepted for publication in the Journal of Low Temperature Physics for LTD-18 special issue