Aspherization and multilayer coating of a Ritchey-Chrétien telescope for λ = 30.4 nm.
Abstract
A high vaccum system designed for the deposition of multilayers for soft X-ray mirrors is described. It is applied to the aspherization and multilayer coating of the mirrors of a solar Ritchey-Chretien telescope. In a first step, laterally graded boron layers are deposited on flat polished silica substrate in order to determine their thickness profile by visible light interferometry. The next step consists in the characterization of multilayers deposited on top of the boron layer. Grazing incidence X-ray interferometry is applied to the measurement of interface roughness; the results are used to predict the performances of W/Si multilayers; it is found that reflectivity values of about 25 percent could be obtained for normal reflection at 30.4 nm.
- Publication:
-
Applications of thin-film multilayered structures to figured X-ray optics
- Pub Date:
- 1985
- DOI:
- 10.1117/12.949677
- Bibcode:
- 1985SPIE..563..275C
- Keywords:
-
- Asphericity;
- Coatings;
- Extreme Ultraviolet Radiation;
- High Vacuum;
- X Ray Telescopes;
- Boron;
- Performance Prediction;
- Reflectance;
- Silicon Dioxide;
- Surface Roughness;
- Optics;
- Mirrors:X Rays;
- Telescopes:Coatings;
- X Rays:Mirrors